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A User's Guide to Vacuum Technology, 3rd Edition (Physics) Hardcover – 22 Jul 2003


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Product details

  • Hardcover: 536 pages
  • Publisher: Wiley-Blackwell; 3rd Edition edition (22 July 2003)
  • Language: English
  • ISBN-10: 0471270520
  • ISBN-13: 978-0471270522
  • Product Dimensions: 16.5 x 3 x 24.1 cm
  • Average Customer Review: 5.0 out of 5 stars  See all reviews (4 customer reviews)
  • Amazon Bestsellers Rank: 959,312 in Books (See Top 100 in Books)
  • See Complete Table of Contents

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Review

"...an excellent handbook for engineers, scientists, or anybody who uses vacuum systems on a regular basis." ( IEEE Circuits & Devices Magazine , May/June 2005) "...clearly written with...many helpful hints...highly recommended." ( MRS Bulletin , January 2005) "This book sucks in a good way…the third edition will never get dusty on my bookshelf…although the text is certainly not coffee–table reading material, it will have a wide appeal…it is particularly valuable as a reference for those who work practically with vacuum technologies and a must–buy for those who design them." ( JOM , February 26, 2004) "...a fundamental understanding of modern vacuum technology and a practical user′s perspective of laboratory and industrial vacuum technology. This edition, while still providing core information in a very practical style...covers many new advances in the field...there are loads of graphs, data, and tables to provide practical and useful information to the vacuum user." ( IEEE Electrical Insulation Magazine )

"...an excellent handbook for engineers, scientists, or anybody who uses vacuum systems on a regular basis." ( IEEE Circuits & Devices Magazine , May/June 2005) "...clearly written with...many helpful hints...highly recommended." ( MRS Bulletin , January 2005) "This book...is particularly valuable as a reference for those who work practically with vacuum technologies and a must–buy for those who design them." ( JOM , February 26, 2004)

From the Back Cover

The leading text in the field–fully updated to reflect changes in vacuum technology In the decade and a half since the publication of the Second Edition of A User’s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination–free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today’s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User’s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user. The Third Edition features significant additions, including: Updated coverage of all topics A discussion of SI units and their conversion Expanded coverage of gauges, pumps, materials, components, and systems A discussion of ultraclean vacuum systems–now used routinely in high–volume production of semiconductor chips and related process–sensitive devices A review of rough pumping and crossover, including methods for prevention of aerosol formation As with previous editions, the Third Edition is an important resource for both students and professionals in microelectronics, optics, thin–film coating, and other industries dependent on leading–edge applications of vacuum technology.

Inside This Book (Learn More)
First Sentence
Torricelli is credited with the conceptual understanding of the vacuum within a mercury column by 1643. Read the first page
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Customer Reviews

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Most Helpful Customer Reviews

1 of 1 people found the following review helpful By A Customer on 7 April 2000
Format: Hardcover
There is no question that the exhaustive detail of this book is seriously refreshing. I have to confess to knowing very little, if anything, about the subject but I was left in no doubt that if I could have understood this book it would have had the answer to all my questions. But it's not just for specialists, despite its intimidating title. The illustrations are great, mindful of early Blyton, and the index is expertly alphabetized. I can't recommend it highly enough. If I have one criticism it is that the font is sometimes distracting and the angle of hanging punctuation occasionally an irritation. Small beer, just read it.
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1 of 1 people found the following review helpful By A Customer on 16 May 1997
Format: Hardcover
I borrowed this book from a colleague here at Applied Materials. After looking at it for a few minutes, I offered to buy it from him. Of course, he refused. So here I am at Amazon (physically at work) to purchase the book. It is extremely practical and I intend to keep it here at work as a reference for problems I encounter. By the way, my web address is [...] Please feel free to visit or email me.
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1 of 1 people found the following review helpful By A Customer on 9 May 1997
Format: Hardcover
John f. O'Hanlon is so thorough,
and has so much to offer. Whether the reader is
an engineer or an operator of a vacuum system
there is plenty here for each.
This is a reference book, so never lend it to anyone!
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By A Customer on 2 July 1998
Format: Hardcover
Thankful we found more complete data on vacuum system.
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Most Helpful Customer Reviews on Amazon.com (beta)

Amazon.com: 8 reviews
4 of 4 people found the following review helpful
everyone in semiconductor industrie must read this book 3 Sep 2005
By Andreas Berthe - Published on Amazon.com
Format: Hardcover
Since I work in a very big semi' fab as field service engineer I looking for a good description of any tool part's on several manufacturing machines. But i work in Germany and it isn't so easy to find much more and better information as for an student without experience. It is my second book about vakuum technologie, all new kinds of engineering and also standard technologie is well prepaired in this issue. Some description of Pump's could be better or more funktionplan's , but all in one book is maybe too much. I was very surprised of this universal Handbook for engineer's and technician, best offer for all who need information about PVD, CVD, Implant vakuum etc. A lot of basic's in introduction part, well to understand, intresting gas properties, cluster technologie and last but not least - a big appendix with all what you need , very fine. Thank's for this good book.
6 of 7 people found the following review helpful
Execellent, practical and comprehensive reference book. 16 May 1997
By A Customer - Published on Amazon.com
Format: Hardcover
I borrowed this book from a colleague here at Applied Materials. After looking at it for a few minutes, I offered to buy it from him. Of course, he refused. So here I am at Amazon (physically at work) to purchase the book. It is extremely practical and I intend to keep it here at work as a reference for problems I encounter. By the way, my web address is [...] Please feel free to visit or email me
4 of 6 people found the following review helpful
The Last Word in Flow Leak Detection! 24 Aug 2006
By Brian Moore - Published on Amazon.com
Format: Hardcover
A colleague who likes to call himself "Captain Suction" and I were debating the exigencies of a client's flow leak detection problem, and needless to say, things got quite hot. At least they did until I slammed O'Hanlon's volume on his cubicle and yelled, "Look it up, sucker!" I didn't hear a peep from him for weeks.
Pretty much everything 22 Nov 2009
By C. Johnson - Published on Amazon.com
Format: Hardcover
This book is indispensable for someone dealing with HV and UHV systems, especially in smaller science labs which do not have access to "institutional" knowledge or are venturing into new territory in the field of vacuum. Covers an extremely broad range of topics with helpful graphs and tables, and what it doesn't have is at least well referenced so you can go look it up. This book was never far from me when building a new instrument.
The Bible for high vacuum systems 11 May 2012
By Pete - Published on Amazon.com
Format: Hardcover Verified Purchase
I'm an electrical engineer who was asked to take over a large vacuum lab with six systems used in satellite development. It was a daunting task. This book saved me. I read it cover to cover and learned everything I needed to deal effectively with vendors and technologists. I bought a second copy for the mechanical engineer that I hired to run the place. He used it more as a reference book. In other words, it has something for everyone.
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