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Practical MEMS: Analysis and Design of Microsystems, MEMS Sensors (accelerometers, Pressure Sensors, Gyroscopes), Sensor Electronics, Actuators, RF MEMS, Optical MEMS, and Microfluidic Systems
 
 
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Practical MEMS: Analysis and Design of Microsystems, MEMS Sensors (accelerometers, Pressure Sensors, Gyroscopes), Sensor Electronics, Actuators, RF MEMS, Optical MEMS, and Microfluidic Systems [Hardcover]

Ville Kaajakari
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Product details

  • Hardcover: 465 pages
  • Publisher: Small Gear Publishing (17 Mar 2009)
  • Language English
  • ISBN-10: 0982299109
  • ISBN-13: 978-0982299104
  • Product Dimensions: 1.8 x 2.5 x 0.3 cm
  • Average Customer Review: 5.0 out of 5 stars  See all reviews (1 customer review)
  • Amazon Bestsellers Rank: 517,226 in Books (See Top 100 in Books)

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Product Description

Product Description

Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include:

Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design.

Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks.

Quantitative performance analysis. The critical performance parameters for the given application are identified and analyzed. For example, the noise and power performance of piezoresistive and capacitive accelerometers is analyzed in detail. Mechanical, resistive (thermal and 1/f-noise), and circuit noise analysis is covered.

Application specifications. Different MEMS applications are compared to commercial design requirements. For example, the optical MEMS is analyzed in the context of bar code scanner, projection displays, and optical cross connect specifications.

MEMS economics and market analysis. A full chapter is devoted to yield and cost analysis of microfabricated devices. In addition, the market economics for emerging applications such as RF MEMS is discussed.


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Front Cover | Copyright | Table of Contents | Excerpt | Index | Back Cover
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Most Helpful Customer Reviews
1 of 1 people found the following review helpful
Practical MEMS indeed 29 Aug 2010
Format:Hardcover
The book "Practical MEMS" provides an excellent primer and reference for both the novice and experienced engineers and scientists working in the field of MEMS. It is a rather comprehensive text, written in a clear and accessible language. The author does a very good job of explaning the theory, the application potential and moreover the performance characteristics of a wide range of MEMS devices and systems. He presents the material in a very understandable manner along with numerous illustrative analysis examples. The book is definitely an asset for your bookshelf.
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Amazon.com:  8 reviews
3 of 3 people found the following review helpful
Best MEMS Book Available 8 April 2009
By S. McNamara - Published on Amazon.com
Format:Hardcover
I am very happy to see this book. It covers MEMS devices. It does not cover microfabrication techniques -- there other books for that subject. It is not a survey book. This is a good book, and it is filled with a lot of useful equations. The book is also very easy to read, and it has a number of good examples. This book is perfect for someone who wants to design MEMS devices.
2 of 2 people found the following review helpful
Invaluable source of MEMS information 2 Sep 2009
By Antti Jaakkola - Published on Amazon.com
Format:Hardcover
As a MEMS professional I find this book an invaluable complement to the selection of MEMS textbooks - I wish this book had existed already when I started my career in the field. The book is well written, and the practical examples facilitate understanding of the subject. For me, especially the chapters on readout electronics have helped me become a better MEMS designer. I highly recommend investing in this book.
A good intro to MEMS devices, design, etc.... 15 April 2009
By J. Sweeney - Published on Amazon.com
Format:Hardcover|Amazon Verified Purchase
This book gives an excellent outline of the design process, fabrication, and cost analysis of developing a MEMS device. Highly recommended for courses focusing on MEMS development or as a reference for those experienced in the field.
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