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Handbook of Microlithography, Micromachining and Microfabrication: Vol.1 (Handbook of Microlithography, Micromachining, and Microfabrication) Hardcover – 31 Oct 1999


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Amazon.com: 2 reviews
A good introduction to microlithography. 26 Aug 2013
By Dr. Paul Dunn - Published on Amazon.com
Format: Hardcover Verified Purchase
A good introduction. The book is a little old now so does not reflect current best technology and leading edge instruments.
0 of 2 people found the following review helpful
For people interested in advanced lithography 5 April 2000
By Shyuan-Fang Chen - Published on Amazon.com
Format: Hardcover
The book gives detailed description in electron beam lithography, X-ray lithography, deep-UV resist lithography and photomask fabrication, etc.
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