• RRP: £105.95
  • You Save: £5.00 (5%)
FREE Delivery in the UK.
Only 1 left in stock (more on the way).
Dispatched from and sold by Amazon.
Gift-wrap available.
Handbook of Microlithogra... has been added to your Basket
Have one to sell?
Flip to back Flip to front
Listen Playing... Paused   You're listening to a sample of the Audible audio edition.
Learn more
See this image

Handbook of Microlithography, Micromachining and Microfabrication: Vol.1 (Handbook of Microlithography, Micromachining, and Microfabrication) Hardcover – 31 Oct 1999

See all 2 formats and editions Hide other formats and editions
Amazon Price New from Used from
"Please retry"
£82.90 £9.95

Product details

Customer Reviews

There are no customer reviews yet on Amazon.co.uk.
5 star
4 star
3 star
2 star
1 star

Most Helpful Customer Reviews on Amazon.com (beta)

Amazon.com: 2 reviews
A good introduction to microlithography. 26 Aug 2013
By Dr. Paul Dunn - Published on Amazon.com
Format: Hardcover Verified Purchase
A good introduction. The book is a little old now so does not reflect current best technology and leading edge instruments.
0 of 2 people found the following review helpful
For people interested in advanced lithography 5 April 2000
By Shyuan-Fang Chen - Published on Amazon.com
Format: Hardcover
The book gives detailed description in electron beam lithography, X-ray lithography, deep-UV resist lithography and photomask fabrication, etc.
Were these reviews helpful? Let us know