'This is an excellent textbook presenting the fundamentals of electromechanics required by every practising MEMS engineer. The authors treat the arduous concepts of coupled electrical and mechanical systems simultaneously with lucidity and a thorough pedagogical rigor that comes from deep appreciation of the field and the love to impart that knowledge as a teacher. The book elucidates the concepts with very topical examples of microelectromechanical systems such as MEMS microphones, comb drive actuators, gyroscopes, energy harvesters, and piezoelectric and magnetic devices including Matlab® models and [a] comprehensive set of problems at the end of each chapter.' Srinivas Tadigadapa, Pennsylvania State University
'A fantastic book for the student seeking a solid foundation in electromechanical device design and an essential reference for the expert MEMS engineer. Jones and Nenadic present the fundamental theory behind electromechanical transduction, with a focus on capacitive drive and sense microsystems. The authors systematically frame the device fundamentals into real world micro scale device applications that provide relevance to the underlying physics. This book captures and dutifully explains the foundational physics at work in the MEMS devices we often unknowingly use daily in our automobiles, mobile phones and electronic devices.' Chris Keimel, GE Global Research
'Electromechanics and MEMS is a thorough treatment of fundamental MEMS analysis for both the student and the practitioner. The readers are presented with the tools to methodically build system models that are comprehensive yet manageable.' Eric Chojnacki, MEMSIC, Inc.
'Having designed and built MEMS for many years, I have come to appreciate a clear well-written book on the subject. The treatment by Jones and Nenadic is excellent. MEMS is a field of many specialties requiring knowledge of fabrication, electrostatics, mechanics, noise and circuits. The authors provide broad coverage of these topics, and thus allow students to understand how these systems fit together. The details on electrostatics and mechanics are rich and there are numerous examples which motivate these topics. The writing style is clear and approachable; light-hearted when possible and diligent when necessary. Ultimately, the text serves to sufficiently train the reader in the design trade-offs inherent in MEMS design. I am glad to see this new text and expect it to be a valuable resource for years to come.' Kevin A. Shaw, Sensor Platforms, Inc.
Offers a consistent, systematic treatment of MEMS, from basic electromechanical transducers through to high-level sensors and actuators. This comprehensive textbook relates each new topic back to the underlying theoretical fundamentals and is accompanied by worked examples and numerous homework problems.